@article{96c4e8ffe4fb40139f9a07a42cefdcc2,
title = "Argon ion multibeam nanopatterning of Ni-Cu inserts for injection molding",
author = "A. Koeck and R. Bruck and M. Wellenzohn and R. Hainberger and E. Platzgummer and H. Loeschner and P. Joechl and S. Eder-Kapl and C. Ebm and P. Czepl and K. Kaiblinger and F. Pipelka and F. Letzkus and M. Irmscher and B. Heitkamp",
year = "2010",
doi = "10.1116/1.3517643",
language = "English",
journal = "Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics",
issn = "2166-2746",
publisher = "AVS Science and Technology Society",
}