@article{2a6e2ef7230c480297b297417bef2526,
title = "Atomic layer deposition temperature dependent minority carrier generation in ZrO2 / GeO2 /Ge capacitors",
author = "O. Bethge and S. Abermann and C. Henkel and J. Smoliner and E. Bertagnolli and C.J. Straif and H. Hutter",
year = "2011",
doi = "10.1116/1.3521472",
language = "Undefined/Unknown",
journal = "Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics",
issn = "2166-2746",
publisher = "AVS Science and Technology Society",
}