CuO nanowire gas sensors for CO detection in humid atmosphere

Stephan Steinhauer; Elise Brunet; T. Maier; Giorgio Cataldo Mutinati; Anton Köck

CuO nanowire gas sensors for CO detection in humid atmosphere

Stephan Steinhauer (Vortragende:r), Elise Brunet, T. Maier, Giorgio Cataldo Mutinati, Anton Köck

Molecular Diagnostics

Publikation: Beitrag in Buch oder Tagungsband › Beitrag in Tagungsband mit Posterpräsentation › Begutachtung

Abstract

In this paper we report on conductometric gas sensors based on suspended CuO nanowire arrays for CO detection in humid atmosphere. CuO nanowires with very small diameters (10nm - 30nm) are synthesized by a thermal oxidation process of Cu microstructures. Our approach allows efficient CuO nanowire integration using a CMOS backend compatible technology. We perform CO measurements in a concentration range between 25ppm and 150ppm and investigate humidity interference effects by comparing CO measurements in dry and humid atmosphere.

Originalsprache	Englisch
Titel	Proceedings of The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
Seitenumfang	4
Publikationsstatus	Veröffentlicht - 2013
Veranstaltung	17th International Conference on Solid-State Sensors, Actuators and Microsystems - Dauer: 16 Juni 2013 → 20 Juni 2013

Konferenz

Konferenz	17th International Conference on Solid-State Sensors, Actuators and Microsystems
Zeitraum	16/06/13 → 20/06/13

Research Field

Außerhalb der AIT Research Fields

Schlagwörter

CuO nanowire
on-chip synthesis
gas sensor
humidity interference
CO detection

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title = "CuO nanowire gas sensors for CO detection in humid atmosphere",

abstract = "In this paper we report on conductometric gas sensors based on suspended CuO nanowire arrays for CO detection in humid atmosphere. CuO nanowires with very small diameters (10nm - 30nm) are synthesized by a thermal oxidation process of Cu microstructures. Our approach allows efficient CuO nanowire integration using a CMOS backend compatible technology. We perform CO measurements in a concentration range between 25ppm and 150ppm and investigate humidity interference effects by comparing CO measurements in dry and humid atmosphere.",

keywords = "CuO nanowire, on-chip synthesis, gas sensor, humidity interference, CO detection, CuO nanowire, on-chip synthesis, gas sensor, humidity interference, CO detection",

author = "Stephan Steinhauer and Elise Brunet and T. Maier and Mutinati, {Giorgio Cataldo} and Anton K{\"o}ck",

year = "2013",

language = "English",

isbn = "978-1-4673-5981-8",

booktitle = "Proceedings of The 17th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "17th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 16-06-2013 Through 20-06-2013",

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TY - CHAP

T1 - CuO nanowire gas sensors for CO detection in humid atmosphere

AU - Brunet, Elise

AU - Maier, T.

AU - Mutinati, Giorgio Cataldo

AU - Köck, Anton

A2 - Steinhauer, Stephan

PY - 2013

Y1 - 2013

N2 - In this paper we report on conductometric gas sensors based on suspended CuO nanowire arrays for CO detection in humid atmosphere. CuO nanowires with very small diameters (10nm - 30nm) are synthesized by a thermal oxidation process of Cu microstructures. Our approach allows efficient CuO nanowire integration using a CMOS backend compatible technology. We perform CO measurements in a concentration range between 25ppm and 150ppm and investigate humidity interference effects by comparing CO measurements in dry and humid atmosphere.

AB - In this paper we report on conductometric gas sensors based on suspended CuO nanowire arrays for CO detection in humid atmosphere. CuO nanowires with very small diameters (10nm - 30nm) are synthesized by a thermal oxidation process of Cu microstructures. Our approach allows efficient CuO nanowire integration using a CMOS backend compatible technology. We perform CO measurements in a concentration range between 25ppm and 150ppm and investigate humidity interference effects by comparing CO measurements in dry and humid atmosphere.

KW - CuO nanowire

KW - on-chip synthesis

KW - gas sensor

KW - humidity interference

KW - CO detection

KW - CuO nanowire

KW - on-chip synthesis

KW - gas sensor

KW - humidity interference

KW - CO detection

M3 - Conference Proceedings with Poster Presentation

SN - 978-1-4673-5981-8

BT - Proceedings of The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - 17th International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 16 June 2013 through 20 June 2013

ER -

CuO nanowire gas sensors for CO detection in humid atmosphere

Abstract

Konferenz

Research Field

Schlagwörter

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