Fabrication of highly ordered nanopillar arrays and defined etching of ALD-grown all-around platinum films

O. Bethge, G. Pozzovivo, C. Henkel, Stephan Abermann, E. Bertagnolli

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	85013
Seitenumfang	1
Fachzeitschrift	Journal of Micromechanics and Microengineering
Publikationsstatus	Veröffentlicht - 2012

Research Field

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title = "Fabrication of highly ordered nanopillar arrays and defined etching of ALD-grown all-around platinum films",

author = "O. Bethge and G. Pozzovivo and C. Henkel and Stephan Abermann and E. Bertagnolli",

year = "2012",

language = "English",

pages = "85013",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

}

TY - JOUR

T1 - Fabrication of highly ordered nanopillar arrays and defined etching of ALD-grown all-around platinum films

AU - Bethge, O.

AU - Pozzovivo, G.

AU - Henkel, C.

AU - Abermann, Stephan

AU - Bertagnolli, E.

PY - 2012

Y1 - 2012

M3 - Article

SN - 0960-1317

SP - 85013

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -