Humidity-driven degradation of sputtered molybdenum oxide and molybdenum–titanium-oxide thin films

Selina Goetz, Stefan Edinger, Christian Linke, Enrico Franzke, Joerg Winkler, Markus Valtiner, Theodoros Dimopoulos

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Fachzeitschrift	Journal of Materials Chemistry C
DOIs	https://doi.org/10.1039/D2TC04267C
Publikationsstatus	Veröffentlicht - 2023

Research Field

@article{b97b4c57c6c3422d9adca93fddae0162,

title = "Humidity-driven degradation of sputtered molybdenum oxide and molybdenum–titanium-oxide thin films",

keywords = "transparent electrodes, oxide stability, sputter deposition",

author = "Selina Goetz and Stefan Edinger and Christian Linke and Enrico Franzke and Joerg Winkler and Markus Valtiner and Theodoros Dimopoulos",

year = "2023",

doi = "10.1039/D2TC04267C",

language = "English",

journal = "Journal of Materials Chemistry C",

issn = "2050-7526",

publisher = "Royal Society of Chemistry",

}

TY - JOUR

T1 - Humidity-driven degradation of sputtered molybdenum oxide and molybdenum–titanium-oxide thin films

AU - Goetz, Selina

AU - Edinger, Stefan

AU - Linke, Christian

AU - Franzke, Enrico

AU - Winkler, Joerg

AU - Valtiner, Markus

AU - Dimopoulos, Theodoros

PY - 2023

Y1 - 2023

KW - transparent electrodes

KW - oxide stability

KW - sputter deposition

U2 - 10.1039/D2TC04267C

DO - 10.1039/D2TC04267C

M3 - Article

SN - 2050-7526

JO - Journal of Materials Chemistry C

JF - Journal of Materials Chemistry C

ER -