Impact of AL, NI, and tin metal gates on ZRO<inf>2</inf>-MOS capacitors

Publikation: Beitrag in Buch oder Tagungsband › Vortrag mit Beitrag in Tagungsband › Begutachtung

Research Field

@inproceedings{21b405337d264e3f8df07bdbfca3ac32,

title = "Impact of AL, NI, and tin metal gates on ZRO2-MOS capacitors",

author = "S. Abermann and J. Efavi and A. Lugstein and E. Auer and H. Gottlob and M. Schmidt and M. Lemme and E. Bertagnolli",

year = "2006",

doi = "10.1149/1.2209300",

language = "Undefined/Unknown",

booktitle = "ECS Transactions",

}

TY - GEN

T1 - Impact of AL, NI, and tin metal gates on ZRO2-MOS capacitors

AU - Abermann, S.

AU - Efavi, J.

AU - Lugstein, A.

AU - Auer, E.

AU - Gottlob, H.

AU - Schmidt, M.

AU - Lemme, M.

AU - Bertagnolli, E.

PY - 2006

Y1 - 2006

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-33845273804&partnerID=MN8TOARS

U2 - 10.1149/1.2209300

DO - 10.1149/1.2209300

M3 - Vortrag mit Beitrag in Tagungsband

BT - ECS Transactions

ER -