Investigating CMOS compatibility of gas sensors based on nanocrystalline SnO2 films: structural stability and O2 ashing

Publikation: Posterpräsentation ohne Beitrag in Tagungsband › Posterpräsentation ohne Eintrag in Tagungsband

Konferenz	MNE 2012
Zeitraum	16/09/12 → 21/09/12

Research Field

@conference{cc6d66e506484d238420228f8c797e68,

title = "Investigating CMOS compatibility of gas sensors based on nanocrystalline SnO2 films: structural stability and O2 ashing",

author = "Mutinati, \{Giorgio Cataldo\} and E. Brunet and S. Steinhauer and A. K{\"o}ck and A. Neuhold and R. Resel",

year = "2012",

language = "English",

note = "MNE 2012 ; Conference date: 16-09-2012 Through 21-09-2012",

}

TY - CONF

T1 - Investigating CMOS compatibility of gas sensors based on nanocrystalline SnO2 films: structural stability and O2 ashing

AU - Brunet, E.

AU - Steinhauer, S.

AU - Köck, A.

AU - Neuhold, A.

AU - Resel, R.

A2 - Mutinati, Giorgio Cataldo

PY - 2012

Y1 - 2012

M3 - Poster presentation without proceedings

T2 - MNE 2012

Y2 - 16 September 2012 through 21 September 2012

ER -