Investigation of integrated circuits by an electron mirror attachment on a SEM

E. Wilfing, E.M. Hörl

Publikation: Beitrag in Buch oder Tagungsband › Vortrag mit Beitrag in Tagungsband

Originalsprache	Englisch
Titel	9. international congress 'electron microscopy 1978'
Seiten	671
Seitenumfang	1
Publikationsstatus	Veröffentlicht - 1978
Veranstaltung	9. international congress 'electron microscopy 1978' - Dauer: 1 Jan. 1978 → …

Konferenz	9. international congress 'electron microscopy 1978'
Zeitraum	1/01/78 → …

Research Field

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title = "Investigation of integrated circuits by an electron mirror attachment on a SEM",

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author = "E. Wilfing and E.M. H{\"o}rl",

year = "1978",

language = "English",

pages = "671",

booktitle = "9. international congress 'electron microscopy 1978'",

note = "9. international congress 'electron microscopy 1978' ; Conference date: 01-01-1978",

}

TY - GEN

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AU - Wilfing, E.

AU - Hörl, E.M.

PY - 1978

Y1 - 1978

KW - FZS-000WEP

M3 - Conference Proceedings with Oral Presentation

SP - 671

BT - 9. international congress 'electron microscopy 1978'

T2 - 9. international congress 'electron microscopy 1978'

Y2 - 1 January 1978

ER -