@article{bda8a5d6acac40f0b9128782f96a2435,
title = "Ion multi-beam direct sputtering of Si imprint stamps and simulation of resulting structures",
author = "S Eder-Kapl and A. Steiger-Thirsfeld and M. Wellenzohn and A. K{\"o}ck and R. Hainberger and H. L{\"o}schner and E Platzgummer",
year = "2012",
doi = "10.1088/0960-1317/22/5/055008",
language = "English",
volume = "22",
pages = "55008",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
}