Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition

C Ebm; E Platzgummer; H. Löschner; S Eder-Kapl; P Jöchl; M Kümmel; R Reitinger; G Hobler; A. Köck; Rainer Hainberger; Markus Wellenzohn; F Letzkus; M Irmscher

Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition

C Ebm, E Platzgummer, H. Löschner, S Eder-Kapl, P Jöchl, M Kümmel, R Reitinger, G Hobler, A. Köck, Rainer Hainberger, Markus Wellenzohn, F Letzkus, M Irmscher

Molecular Diagnostics

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	2668-2673
Seitenumfang	6
Fachzeitschrift	Journal of Vacuum Science and Technology B
Volume	27
Issue	6
Publikationsstatus	Veröffentlicht - 2009

Research Field

Ehemaliges Research Field - Health and Bioresources

Diese Publikation zitieren

Ebm, C., Platzgummer, E., Löschner, H., Eder-Kapl, S., Jöchl, P., Kümmel, M., Reitinger, R., Hobler, G., Köck, A., Hainberger, R., Wellenzohn, M., Letzkus, F., & Irmscher, M. (2009). Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition. Journal of Vacuum Science and Technology B, 27(6), 2668-2673.

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title = "Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition",

author = "C Ebm and E Platzgummer and H. L{\"o}schner and S Eder-Kapl and P J{\"o}chl and M K{\"u}mmel and R Reitinger and G Hobler and A. K{\"o}ck and Rainer Hainberger and Markus Wellenzohn and F Letzkus and M Irmscher",

year = "2009",

language = "English",

volume = "27",

pages = "2668--2673",

journal = "Journal of Vacuum Science and Technology B",

issn = "1071-1023",

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Ebm, C, Platzgummer, E, Löschner, H, Eder-Kapl, S, Jöchl, P, Kümmel, M, Reitinger, R, Hobler, G, Köck, A, Hainberger, R, Wellenzohn, M, Letzkus, F & Irmscher, M 2009, 'Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition', Journal of Vacuum Science and Technology B, Vol. 27, Nr. 6, S. 2668-2673.

TY - JOUR

T1 - Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition

AU - Ebm, C

AU - Platzgummer, E

AU - Löschner, H.

AU - Eder-Kapl, S

AU - Jöchl, P

AU - Kümmel, M

AU - Reitinger, R

AU - Hobler, G

AU - Köck, A.

AU - Hainberger, Rainer

AU - Wellenzohn, Markus

AU - Letzkus, F

AU - Irmscher, M

PY - 2009

Y1 - 2009

M3 - Article

SN - 1071-1023

VL - 27

SP - 2668

EP - 2673

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

IS - 6

ER -