@article{1ae99d60b94a4cc889477727acbf32dc,
title = "Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition",
author = "C Ebm and E Platzgummer and H. L{\"o}schner and S Eder-Kapl and P J{\"o}chl and M K{\"u}mmel and R Reitinger and G Hobler and A. K{\"o}ck and Rainer Hainberger and Markus Wellenzohn and F Letzkus and M Irmscher",
year = "2009",
language = "English",
volume = "27",
pages = "2668--2673",
journal = "Journal of Vacuum Science and Technology B",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}