Nanoscopic versus macroscopic C-V characterization of high-κ metal-oxide chemical vapor deposition ZrO<inf>2</inf> thin films

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	undefiniert/unbekannt
Fachzeitschrift	Microelectronic Engineering
DOIs	https://doi.org/10.1016/j.mee.2006.01.036
Publikationsstatus	Veröffentlicht - 2006

Research Field

@article{80b9d893eb394084a9f10c9081356332,

title = "Nanoscopic versus macroscopic C-V characterization of high-κ metal-oxide chemical vapor deposition ZrO2 thin films",

author = "S. Abermann and W. Brezna and J. Smoliner and E. Bertagnolli",

year = "2006",

doi = "10.1016/j.mee.2006.01.036",

language = "Undefined/Unknown",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Nanoscopic versus macroscopic C-V characterization of high-κ metal-oxide chemical vapor deposition ZrO2 thin films

AU - Abermann, S.

AU - Brezna, W.

AU - Smoliner, J.

AU - Bertagnolli, E.

PY - 2006

Y1 - 2006

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-33646025831&partnerID=MN8TOARS

U2 - 10.1016/j.mee.2006.01.036

DO - 10.1016/j.mee.2006.01.036

M3 - Artikel

SN - 0167-9317

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -