PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region

Rainer Hainberger; P. Müllner; Stefan Nevlacsil; Florian Vogelbacher; Alejandro Maese-Novo; Martin Sagmeister; Günther Koppitsch; J. Kraft; Xue Zhou; Jinhua Huang; Mingzhu Li; Ke-Jian Jiang; Yanlin Song

PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region

Rainer Hainberger (Vortragende:r, eingeladen), P. Müllner (Autor:in, eingeladen), Stefan Nevlacsil (Autor:in, eingeladen), Florian Vogelbacher (Autor:in, eingeladen), Alejandro Maese-Novo (Autor:in, eingeladen), Martin Sagmeister (Autor:in, eingeladen), Günther Koppitsch (Autor:in, eingeladen), J. Kraft (Autor:in, eingeladen), Xue Zhou (Autor:in, eingeladen), Jinhua Huang (Autor:in, eingeladen), Mingzhu Li (Autor:in, eingeladen), Ke-Jian Jiang (Autor:in, eingeladen), Yanlin Song (Autor:in, eingeladen)

Molecular Diagnostics

Publikation: Beitrag in Buch oder Tagungsband › Vortrag mit Beitrag in Tagungsband › Begutachtung

Originalsprache	Englisch
Titel	SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications
Publikationsstatus	Veröffentlicht - 2019
Veranstaltung	SPIE Optics - Dauer: 1 Apr. 2019 → 4 Apr. 2019

Konferenz

Konferenz	SPIE Optics
Zeitraum	1/04/19 → 4/04/19

Research Field

Molecular Diagnostics

Diese Publikation zitieren

Hainberger, R., Müllner, P., Nevlacsil, S., Vogelbacher, F., Maese-Novo, A., Sagmeister, M., Koppitsch, G., Kraft, J., Zhou, X., Huang, J., Li, M., Jiang, K.-J., & Song, Y. (2019). PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region. in SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications

@inproceedings{133093cccc13478ba1100c4d4d11e4a0,

title = "PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region",

author = "Rainer Hainberger and P. M{\"u}llner and Stefan Nevlacsil and Florian Vogelbacher and Alejandro Maese-Novo and Martin Sagmeister and G{\"u}nther Koppitsch and J. Kraft and Xue Zhou and Jinhua Huang and Mingzhu Li and Ke-Jian Jiang and Yanlin Song",

year = "2019",

language = "English",

booktitle = "SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications",

note = "SPIE Optics ; Conference date: 01-04-2019 Through 04-04-2019",

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Hainberger, R , Müllner, P, Nevlacsil, S, Vogelbacher, F, Maese-Novo, A, Sagmeister, M, Koppitsch, G, Kraft, J, Zhou, X, Huang, J, Li, M, Jiang, K-J & Song, Y 2019, PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region. in SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications. SPIE Optics, 1/04/19.

PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region. / Hainberger, Rainer (Vortragende:r, eingeladen); Müllner, P. (Autor:in, eingeladen); Nevlacsil, Stefan (Autor:in, eingeladen) et al.
SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications. 2019.

Publikation: Beitrag in Buch oder Tagungsband › Vortrag mit Beitrag in Tagungsband › Begutachtung

TY - GEN

T1 - PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region

A2 - Hainberger, Rainer

A2 - Müllner, P.

A2 - Nevlacsil, Stefan

A2 - Vogelbacher, Florian

A2 - Maese-Novo, Alejandro

A2 - Sagmeister, Martin

A2 - Koppitsch, Günther

A2 - Kraft, J.

A2 - Zhou, Xue

A2 - Huang, Jinhua

A2 - Li, Mingzhu

A2 - Jiang, Ke-Jian

A2 - Song, Yanlin

PY - 2019

Y1 - 2019

M3 - Conference Proceedings with Oral Presentation

BT - SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications

T2 - SPIE Optics

Y2 - 1 April 2019 through 4 April 2019

ER -