@inproceedings{64fe66725cf04ce1acb845b389a39d59,
title = "PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications",
author = "Rainer Hainberger and P. M{\"u}llner and Stefan Nevlacsil and M. Eggeling and Alejandro Maese-Novo and Florian Vogelbacher and Martin Sagmeister and J. Kraft and Dana Seyringer and Sabine Trupp and Michael Henfling and Svenja Plesshoff and Jan Vaupot and Marcel Sladecek and Elisabeth Rank and Wolfgang Drexler",
year = "2020",
language = "English",
pages = "1",
booktitle = "OSA Optical Sensors and Sensing Congress 2020 Technical Digest",
note = "OSA Optical Sensors and Sensing Congress 2020 ; Conference date: 22-06-2020 Through 26-06-2020",
}