Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning

Anahid Naghibzadeh-Jalali; Clemens Heistracher; Alexander Schindler; Bernhard Haslhofer; Tanja Nemeth; Robert Glawar; Wilfried Sihn; Peter De Boer

Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning

Anahid Naghibzadeh-Jalali (Autor:in, eingeladen)
, Clemens Heistracher (Vortragende:r, eingeladen)
, Alexander Schindler (Autor:in, eingeladen)
, Bernhard Haslhofer (Autor:in, eingeladen)
, Tanja Nemeth (Autor:in, eingeladen)
, Robert Glawar (Autor:in, eingeladen)
, Wilfried Sihn (Autor:in, eingeladen)
, Peter De Boer (Autor:in, eingeladen)

Data Science & Artifical Intelligence

Publikation: Beitrag in Buch oder Tagungsband › Vortrag mit Beitrag in Tagungsband › Begutachtung

Originalsprache	Englisch
Titel	2019 IEEE International Conference on Prognostics and Health Management (ICPHM)
Seiten	1-8
Seitenumfang	8
Publikationsstatus	Veröffentlicht - 2019
Veranstaltung	IEEE International Conference on Prognostics and Health Management (PHM2019) - Dauer: 17 Juni 2019 → 19 Juni 2019

Konferenz

Konferenz	IEEE International Conference on Prognostics and Health Management (PHM2019)
Zeitraum	17/06/19 → 19/06/19

Research Field

Ehemaliges Research Field - Data Science

Diese Publikation zitieren

@inproceedings{cfdd56f3ce6a4a8aa466d4961c031021,

title = "Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning",

author = "Anahid Naghibzadeh-Jalali and Clemens Heistracher and Alexander Schindler and Bernhard Haslhofer and Tanja Nemeth and Robert Glawar and Wilfried Sihn and \{De Boer\}, Peter",

year = "2019",

language = "English",

isbn = "978-1-5386-8357-6",

pages = "1--8",

booktitle = "2019 IEEE International Conference on Prognostics and Health Management (ICPHM)",

note = "IEEE International Conference on Prognostics and Health Management (PHM2019) ; Conference date: 17-06-2019 Through 19-06-2019",

}

Naghibzadeh-Jalali, A, Heistracher, C, Schindler, A, Haslhofer, B, Nemeth, T, Glawar, R, Sihn, W & De Boer, P 2019, Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning. in 2019 IEEE International Conference on Prognostics and Health Management (ICPHM). S. 1-8, IEEE International Conference on Prognostics and Health Management (PHM2019), 17/06/19.

Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning. / Naghibzadeh-Jalali, Anahid (Autor:in, eingeladen); Heistracher, Clemens (Vortragende:r, eingeladen); Schindler, Alexander (Autor:in, eingeladen) et al.
2019 IEEE International Conference on Prognostics and Health Management (ICPHM). 2019. S. 1-8.

Publikation: Beitrag in Buch oder Tagungsband › Vortrag mit Beitrag in Tagungsband › Begutachtung

TY - GEN

T1 - Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning

A2 - Naghibzadeh-Jalali, Anahid

A2 - Heistracher, Clemens

A2 - Schindler, Alexander

A2 - Haslhofer, Bernhard

A2 - Nemeth, Tanja

A2 - Glawar, Robert

A2 - Sihn, Wilfried

A2 - De Boer, Peter

PY - 2019

Y1 - 2019

M3 - Conference Proceedings with Oral Presentation

SN - 978-1-5386-8357-6

SP - 1

EP - 8

BT - 2019 IEEE International Conference on Prognostics and Health Management (ICPHM)

T2 - IEEE International Conference on Prognostics and Health Management (PHM2019)

Y2 - 17 June 2019 through 19 June 2019

ER -