Sputter redeposition as a limit to spatially 3-dimensional SIMS microanalysis

Friedrich Rüdenauer

Publikation: Beitrag in Buch oder Tagungsband › Vortrag mit Beitrag in Tagungsband

Originalsprache	Deutsch
Titel	21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print-
Publikationsstatus	Veröffentlicht - 1986
Veranstaltung	21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print- - Dauer: 1 Jan. 1986 → …

Konferenz	21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print-
Zeitraum	1/01/86 → …

Research Field

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title = "Sputter redeposition as a limit to spatially 3-dimensional SIMS microanalysis",

keywords = "FZS-000IPP, FZS-300IPX, FZS-000IPP, FZS-300IPX",

author = "Friedrich R{\"u}denauer",

year = "1986",

language = "Deutsch",

booktitle = "21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print-",

note = "21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print- ; Conference date: 01-01-1986",

}

TY - GEN

T1 - Sputter redeposition as a limit to spatially 3-dimensional SIMS microanalysis

AU - Rüdenauer, Friedrich

PY - 1986

Y1 - 1986

KW - FZS-000IPP

KW - FZS-300IPX

KW - FZS-000IPP

KW - FZS-300IPX

M3 - Vortrag mit Beitrag in Tagungsband

BT - 21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print-

T2 - 21. annual conference of the Microbeam Analysis Society (EMSA/EMAS-meeting). ]-in print-

Y2 - 1 January 1986

ER -