@article{3c55723c695d41ad9348f131c26f58ec,
title = "Tin oxide nanosensors for highly sensitive toxic gas detection and their 3D system integration",
author = "Christian Griessler and Elise Brunet and T. Maier and Stephan Steinhauer and A. K{\"o}ck and T Jordi and F Schrank and M. Schrems",
year = "2011",
doi = "10.1016/j.mee.2011.02.017",
language = "English",
volume = "8",
pages = "1779--1781",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier BV",
number = "88",
}