Tin oxide nanosensors for highly sensitive toxic gas detection and their 3D system integration

Christian Griessler, Elise Brunet, T. Maier, Stephan Steinhauer, A. Köck, T Jordi, F Schrank, M. Schrems

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	1779-1781
Seitenumfang	3
Fachzeitschrift	Microelectronic Engineering
Volume	8
Issue	88
DOIs	https://doi.org/10.1016/j.mee.2011.02.017
Publikationsstatus	Veröffentlicht - 2011

Research Field

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title = "Tin oxide nanosensors for highly sensitive toxic gas detection and their 3D system integration",

author = "Christian Griessler and Elise Brunet and T. Maier and Stephan Steinhauer and A. K{\"o}ck and T Jordi and F Schrank and M. Schrems",

year = "2011",

doi = "10.1016/j.mee.2011.02.017",

language = "English",

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pages = "1779--1781",

journal = "Microelectronic Engineering",

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TY - JOUR

T1 - Tin oxide nanosensors for highly sensitive toxic gas detection and their 3D system integration

AU - Griessler, Christian

AU - Brunet, Elise

AU - Maier, T.

AU - Steinhauer, Stephan

AU - Köck, A.

AU - Jordi, T

AU - Schrank, F

AU - Schrems, M.

PY - 2011

Y1 - 2011

U2 - 10.1016/j.mee.2011.02.017

DO - 10.1016/j.mee.2011.02.017

M3 - Article

SN - 0167-9317

VL - 8

SP - 1779

EP - 1781

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 88

ER -