Research Field
- Not defined
High resolution defect inspection for EUVL mask blanks by photoemission electron microscopy
- U. Neuhäusler (Author)
- A. Oelsner (Author)
- M. Schicketanz (Author)
- J. Slieh (Author)
- N. Weber (Author)
- M. Brzeska (Author)
- A. Wonisch (Author)
- T. Westerwalbesloh (Author)
- H. Brückl (Author)
- M. Escher (Author)
- M. Merkel (Author)
- G. Schönhense (Author)
- U. Kleineberg (Author)
- U. Heinzmann (Author)
Activity: Talk or presentation / Lecture › Presentation at a scientific conference / workshop