Argon ion multibeam nanopatterning of Ni-Cu inserts for injection molding

A. Koeck; R. Bruck; M. Wellenzohn; R. Hainberger; E. Platzgummer; H. Loeschner; P. Joechl; S. Eder-Kapl; C. Ebm; P. Czepl; K. Kaiblinger; F. Pipelka; F. Letzkus; M. Irmscher; B. Heitkamp

doi:10.1116/1.3517643

Argon ion multibeam nanopatterning of Ni-Cu inserts for injection molding

A. Koeck
, R. Bruck
, M. Wellenzohn
, R. Hainberger
, E. Platzgummer
, H. Loeschner
, P. Joechl
, S. Eder-Kapl
, C. Ebm
, P. Czepl
, K. Kaiblinger
, F. Pipelka
, F. Letzkus
, M. Irmscher
, B. Heitkamp

Molecular Diagnostics

IMS Nanofabrication AG
Hubertus Goller GmbH
Institut für Mikroelektronik Stuttgart

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Journal of Vacuum Science and Technology B
DOIs	https://doi.org/10.1116/1.3517643
Publication status	Published - 2010

Research Field

Molecular Diagnostics

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10.1116/1.3517643

Cite this

@article{96c4e8ffe4fb40139f9a07a42cefdcc2,

title = "Argon ion multibeam nanopatterning of Ni-Cu inserts for injection molding",

author = "A. Koeck and R. Bruck and M. Wellenzohn and R. Hainberger and E. Platzgummer and H. Loeschner and P. Joechl and S. Eder-Kapl and C. Ebm and P. Czepl and K. Kaiblinger and F. Pipelka and F. Letzkus and M. Irmscher and B. Heitkamp",

year = "2010",

doi = "10.1116/1.3517643",

language = "English",

}

TY - JOUR

T1 - Argon ion multibeam nanopatterning of Ni-Cu inserts for injection molding

AU - Koeck, A.

AU - Bruck, R.

AU - Wellenzohn, M.

AU - Hainberger, R.

AU - Platzgummer, E.

AU - Loeschner, H.

AU - Joechl, P.

AU - Eder-Kapl, S.

AU - Ebm, C.

AU - Czepl, P.

AU - Kaiblinger, K.

AU - Pipelka, F.

AU - Letzkus, F.

AU - Irmscher, M.

AU - Heitkamp, B.

PY - 2010

Y1 - 2010

UR - https://www.scopus.com/pages/publications/78650119810

U2 - 10.1116/1.3517643

DO - 10.1116/1.3517643

M3 - Article

SN - 2166-2746

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

ER -

Argon ion multibeam nanopatterning of Ni-Cu inserts for injection molding

Research Field

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