Atomic layer deposition of high-k oxides on InAIN/GaN-based materials

S. Abermann; C. Ostermaier; G. Pozzovivo; J. Kuzmik; O. Bethge; C. Henkel; G. Strasser; D. Pogany; C. Giesen; M. Heuken; E. Kohn; M. Alomari; E. Bertagnolli

Atomic layer deposition of high-k oxides on InAIN/GaN-based materials

S. Abermann
, C. Ostermaier
, G. Pozzovivo
, J. Kuzmik
, O. Bethge
, C. Henkel
, G. Strasser
, D. Pogany
, C. Giesen
, M. Heuken
, E. Kohn
, M. Alomari
, E. Bertagnolli

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

Original language	Undefined/Unknown
Title of host publication	ECS Transactions
Publication status	Published - 2009

Research Field

Energy Conversion and Hydrogen Technologies

Cite this

@inproceedings{cb1ea130e9d843efbc49615926d28615,

title = "Atomic layer deposition of high-k oxides on InAIN/GaN-based materials",

author = "S. Abermann and C. Ostermaier and G. Pozzovivo and J. Kuzmik and O. Bethge and C. Henkel and G. Strasser and D. Pogany and C. Giesen and M. Heuken and E. Kohn and M. Alomari and E. Bertagnolli",

year = "2009",

language = "Undefined/Unknown",

booktitle = "ECS Transactions",

}

TY - GEN

T1 - Atomic layer deposition of high-k oxides on InAIN/GaN-based materials

AU - Abermann, S.

AU - Ostermaier, C.

AU - Pozzovivo, G.

AU - Kuzmik, J.

AU - Bethge, O.

AU - Henkel, C.

AU - Strasser, G.

AU - Pogany, D.

AU - Giesen, C.

AU - Heuken, M.

AU - Kohn, E.

AU - Alomari, M.

AU - Bertagnolli, E.

PY - 2009

Y1 - 2009

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-74249084876&partnerID=MN8TOARS

M3 - Vortrag mit Beitrag in Tagungsband

BT - ECS Transactions

ER -

Atomic layer deposition of high-k oxides on InAIN/GaN-based materials

Research Field

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