CMOS-compatible low-loss silicon nitride waveguide integration platform for interferometric sensing

P. Müllner, Alejandro Maese-Novo, Eva Melnik, Rainer Hainberger, Günther Koppitsch, J. Kraft, Gerald Meinhardt

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings without Presentation

Original language	English
Title of host publication	CMOS-compatible low-loss silicon nitride waveguide integration platform for interferometric sensing
Pages	1-2
Number of pages	2
Publication status	Published - 2016

Research Field

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year = "2016",

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CMOS-compatible low-loss silicon nitride waveguide integration platform for interferometric sensing. / Müllner, P.; Maese-Novo, Alejandro; Melnik, Eva et al.
CMOS-compatible low-loss silicon nitride waveguide integration platform for interferometric sensing. 2016. p. 1-2.

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings without Presentation

TY - CHAP

T1 - CMOS-compatible low-loss silicon nitride waveguide integration platform for interferometric sensing

AU - Müllner, P.

AU - Maese-Novo, Alejandro

AU - Melnik, Eva

AU - Hainberger, Rainer

AU - Koppitsch, Günther

AU - Kraft, J.

AU - Meinhardt, Gerald

PY - 2016

Y1 - 2016

M3 - Conference Proceedings without Presentation

SP - 1

EP - 2

BT - CMOS-compatible low-loss silicon nitride waveguide integration platform for interferometric sensing

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