CMOS-compatible Si3N4 waveguides for optical biosensing.

P. Müllner, E. Melnik, Günther Koppitsch, J. Kraft, F Schrank, R. Hainberger

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)578-581
Number of pages4
JournalProcedia Engineering
Issue number120
Publication statusPublished - 2015

Research Field

  • Outside the AIT Research Fields

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