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CMOS-compatible Si3N4 waveguides for optical biosensing.

  • P. Müllner
  • , E. Melnik
  • , Günther Koppitsch
  • , J. Kraft
  • , F Schrank
  • , R. Hainberger

Research output: Contribution to journal › Article › peer-review

Original languageEnglish
Pages (from-to)578-581
Number of pages4
JournalProcedia Engineering
Issue number120
Publication statusPublished - 2015

Research Field

  • Outside the AIT Research Fields

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