Cross-calibration of SIMS instruments for analysis of metals and semiconductors

Friedrich Rüdenauer, W. Steiger

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation

Original language	English
Title of host publication	5. international conference on secondary ion mass spectrometry (SIMS V).
Pages	118-120
Number of pages	3
Publication status	Published - 1986
Event	5. international conference on secondary ion mass spectrometry (SIMS V). - Duration: 1 Jan 1986 → …

Conference	5. international conference on secondary ion mass spectrometry (SIMS V).
Period	1/01/86 → …

Research Field

@inproceedings{96d55d6ba40f40c78b8e4e7fdfd2dacf,

title = "Cross-calibration of SIMS instruments for analysis of metals and semiconductors",

keywords = "FZS-000IPP, FZS-000IPP",

author = "Friedrich R{\"u}denauer and W. Steiger",

year = "1986",

language = "English",

pages = "118--120",

booktitle = "5. international conference on secondary ion mass spectrometry (SIMS V).",

note = "5. international conference on secondary ion mass spectrometry (SIMS V). ; Conference date: 01-01-1986",

}

TY - GEN

T1 - Cross-calibration of SIMS instruments for analysis of metals and semiconductors

AU - Rüdenauer, Friedrich

AU - Steiger, W.

PY - 1986

Y1 - 1986

KW - FZS-000IPP

M3 - Conference Proceedings with Oral Presentation

SP - 118

EP - 120

BT - 5. international conference on secondary ion mass spectrometry (SIMS V).

T2 - 5. international conference on secondary ion mass spectrometry (SIMS V).

Y2 - 1 January 1986

ER -