Abstract
In this paper we report on conductometric gas sensors based on suspended CuO nanowire arrays for CO detection in humid atmosphere. CuO nanowires with very small diameters (10nm - 30nm) are synthesized by a thermal oxidation process of Cu microstructures. Our approach allows efficient CuO nanowire integration using a CMOS backend compatible technology. We perform CO measurements in a concentration range between 25ppm and 150ppm and investigate humidity interference effects by comparing CO measurements in dry and humid atmosphere.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of The 17th International Conference on Solid-State Sensors, Actuators and Microsystems |
| Number of pages | 4 |
| Publication status | Published - 2013 |
| Event | 17th International Conference on Solid-State Sensors, Actuators and Microsystems - Duration: 16 Jun 2013 → 20 Jun 2013 |
Conference
| Conference | 17th International Conference on Solid-State Sensors, Actuators and Microsystems |
|---|---|
| Period | 16/06/13 → 20/06/13 |
Research Field
- Outside the AIT Research Fields
Keywords
- CuO nanowire
- on-chip synthesis
- gas sensor
- humidity interference
- CO detection
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