Development of a monolithically integrated, CMOS-compatible SiN photonics process flow for sensor and medical applications

Martin Sagmeister; S. Jessenig; P. Müllner; Stefan Nevlacsil; Alejandro Maese-Novo; M. Eggeling; R. Hainberger; Dana Seyringer; Wolfgang Drexler; Elisabeth Rank; J. Kraft

Development of a monolithically integrated, CMOS-compatible SiN photonics process flow for sensor and medical applications

Martin Sagmeister
, S. Jessenig
, P. Müllner
, Stefan Nevlacsil
, Alejandro Maese-Novo
, M. Eggeling
, R. Hainberger
, Dana Seyringer
, Wolfgang Drexler
, Elisabeth Rank
, J. Kraft

Molecular Diagnostics

ams AG

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings without Presentation

Original language	English
Title of host publication	INTERPHOTONICS 2019 - Book of Abstracts
Number of pages	61
Publication status	Published - 2019

Research Field

Molecular Diagnostics

Cite this

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title = "Development of a monolithically integrated, CMOS-compatible SiN photonics process flow for sensor and medical applications",

author = "Martin Sagmeister and S. Jessenig and P. M{\"u}llner and Stefan Nevlacsil and Alejandro Maese-Novo and M. Eggeling and R. Hainberger and Dana Seyringer and Wolfgang Drexler and Elisabeth Rank and J. Kraft",

year = "2019",

language = "English",

booktitle = "INTERPHOTONICS 2019 - Book of Abstracts",

}

TY - CHAP

T1 - Development of a monolithically integrated, CMOS-compatible SiN photonics process flow for sensor and medical applications

AU - Sagmeister, Martin

AU - Jessenig, S.

AU - Müllner, P.

AU - Nevlacsil, Stefan

AU - Maese-Novo, Alejandro

AU - Eggeling, M.

AU - Hainberger, R.

AU - Seyringer, Dana

AU - Drexler, Wolfgang

AU - Rank, Elisabeth

AU - Kraft, J.

PY - 2019

Y1 - 2019

M3 - Conference Proceedings without Presentation

BT - INTERPHOTONICS 2019 - Book of Abstracts

ER -