Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding

R. Bruck; R. Hainberger; R. Heer; N. Kataeva; A. Köck; M. Krapf-Günther; K. Kaiblinger; F. Pipelka; B. Bilenberg

doi:10.1117/12.859817

Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding

R. Bruck
, R. Hainberger
, R. Heer
, N. Kataeva
, A. Köck
, M. Krapf-Günther
, K. Kaiblinger
, F. Pipelka
, B. Bilenberg

Hubertus Goller GmbH
NIL Technology ApS

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.859817
Publication status	Published - 2010

Research Field

Molecular Diagnostics

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10.1117/12.859817

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title = "Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding",

author = "R. Bruck and R. Hainberger and R. Heer and N. Kataeva and A. K{\"o}ck and M. Krapf-G{\"u}nther and K. Kaiblinger and F. Pipelka and B. Bilenberg",

year = "2010",

doi = "10.1117/12.859817",

language = "Undefined/Unknown",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding

AU - Bruck, R.

AU - Hainberger, R.

AU - Heer, R.

AU - Kataeva, N.

AU - Köck, A.

AU - Krapf-Günther, M.

AU - Kaiblinger, K.

AU - Pipelka, F.

AU - Bilenberg, B.

PY - 2010

Y1 - 2010

UR - https://www.scopus.com/pages/publications/78649593694

U2 - 10.1117/12.859817

DO - 10.1117/12.859817

M3 - Vortrag mit Beitrag in Tagungsband

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding

Research Field

Access to Document

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