| Original language | English |
|---|---|
| Pages (from-to) | 523-526 |
| Number of pages | 4 |
| Journal | Vacuum(1985) |
| Publication status | Published - 1985 |
Research Field
- Not defined
Keywords
- FZS-000PHP
EFSA - a new evaluation method of the depth resolution in depth profiling of multilayer structures
D. Marton, J. Laszlo, J. Giber, Friedrich Rüdenauer
Research output: Contribution to journal › Article