EFSA - a new evaluation method of the depth resolution in depth profiling of multilayer structures

D. Marton, J. Laszlo, J. Giber, Friedrich Rüdenauer

    Research output: Contribution to journalArticle

    Original languageEnglish
    Pages (from-to)523-526
    Number of pages4
    JournalVacuum(1985)
    Publication statusPublished - 1985

    Research Field

    • Not defined

    Keywords

    • FZS-000PHP

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