Electrical characteristics of atomic layer deposited aluminium oxide and lanthanum-zirconium oxide high-k dielectric stacks

S. Abermann, C. Henkel, O. Bethge, E. Bertagnolli

Research output: Chapter in Book or Conference ProceedingsConference Proceedings with Oral Presentationpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of the 10th International Conference on ULtimate Integration of Silicon, ULIS 2009
DOIs
Publication statusPublished - 2009

Research Field

  • Energy Conversion and Hydrogen Technologies

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