Fabrication of highly ordered nanopillar arrays and defined etching of ALD-grown all-around platinum films

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	85013
Number of pages	1
Journal	Journal of Micromechanics and Microengineering
Publication status	Published - 2012

Research Field

@article{cf898a6d01814e399ac718e2f47414db,

title = "Fabrication of highly ordered nanopillar arrays and defined etching of ALD-grown all-around platinum films",

author = "O. Bethge and G. Pozzovivo and C. Henkel and Stephan Abermann and E. Bertagnolli",

year = "2012",

language = "English",

pages = "85013",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

}

TY - JOUR

T1 - Fabrication of highly ordered nanopillar arrays and defined etching of ALD-grown all-around platinum films

AU - Bethge, O.

AU - Pozzovivo, G.

AU - Henkel, C.

AU - Abermann, Stephan

AU - Bertagnolli, E.

PY - 2012

Y1 - 2012

M3 - Article

SN - 0960-1317

SP - 85013

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -