Fabrication of Nanoporous Dielectric Films of Controlled Size and Porosity for Combined Electrochemical and Waveguide Measurements

Eric Reimhult, K. Kumar, Wolfgang Knoll

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@article{d413dc74454b417cb7d32a39b4cac9de,

title = "Fabrication of Nanoporous Dielectric Films of Controlled Size and Porosity for Combined Electrochemical and Waveguide Measurements",

author = "Eric Reimhult and K. Kumar and Wolfgang Knoll",

year = "2007",

doi = "10.1088/0957-4484/18/27/275303",

language = "English",

pages = "275303--275310",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing Ltd.",

number = "18",

}

TY - JOUR

T1 - Fabrication of Nanoporous Dielectric Films of Controlled Size and Porosity for Combined Electrochemical and Waveguide Measurements

AU - Reimhult, Eric

AU - Kumar, K.

AU - Knoll, Wolfgang

PY - 2007

Y1 - 2007

U2 - 10.1088/0957-4484/18/27/275303

DO - 10.1088/0957-4484/18/27/275303

M3 - Article

SN - 0957-4484

SP - 275303

EP - 275310

JO - Nanotechnology

JF - Nanotechnology

IS - 18

ER -