Fabrication of UV-photomasks by writing ion beam implantation

Günther Stangl, Friedrich Rüdenauer, J. Mitterauer, Z. Szalmassy, Wolfgang Fallmann

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation

Original language	English
Title of host publication	Microcircuit engineering '83
Publication status	Published - 1983
Event	Microcircuit engineering '83 - Duration: 1 Jan 1983 → …

Conference	Microcircuit engineering '83
Period	1/01/83 → …

Research Field

@inproceedings{87d1d49d4a5d472a9e57ab044601f093,

title = "Fabrication of UV-photomasks by writing ion beam implantation",

keywords = "FZS-000PHP, FZS-300PHX, FZS-000PHP, FZS-300PHX",

author = "G{\"u}nther Stangl and Friedrich R{\"u}denauer and J. Mitterauer and Z. Szalmassy and Wolfgang Fallmann",

year = "1983",

language = "English",

booktitle = "Microcircuit engineering '83",

note = "Microcircuit engineering '83 ; Conference date: 01-01-1983",

}

TY - GEN

T1 - Fabrication of UV-photomasks by writing ion beam implantation

AU - Stangl, Günther

AU - Rüdenauer, Friedrich

AU - Mitterauer, J.

AU - Szalmassy, Z.

AU - Fallmann, Wolfgang

PY - 1983

Y1 - 1983

KW - FZS-000PHP

KW - FZS-300PHX

KW - FZS-000PHP

KW - FZS-300PHX

M3 - Conference Proceedings with Oral Presentation

BT - Microcircuit engineering '83

T2 - Microcircuit engineering '83

Y2 - 1 January 1983

ER -