Herstellung photolithographischer DUV-Arbeitsmasken mittels schreibender und projizierender Ionenimplantation

Friedrich Rüdenauer, Günther Stangl

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation

Original language	German
Title of host publication	VDI-Tagung 'Maskentechnologie'
Publication status	Published - 1985
Event	VDI-Tagung 'Maskentechnologie' - Duration: 1 Jan 1985 → …

Conference	VDI-Tagung 'Maskentechnologie'
Period	1/01/85 → …

Research Field

@inproceedings{ed6377ae3d4243e7b13083262c368a33,

title = "Herstellung photolithographischer DUV-Arbeitsmasken mittels schreibender und projizierender Ionenimplantation",

keywords = "FZS-300PHP, FZS-300PHP",

author = "Friedrich R{\"u}denauer and G{\"u}nther Stangl",

year = "1985",

language = "Deutsch",

booktitle = "VDI-Tagung 'Maskentechnologie'",

note = "VDI-Tagung 'Maskentechnologie' ; Conference date: 01-01-1985",

}