Abstract
Interdigitated dielectric capacitors (IDC) are a key component in numerous technologies, such as labonachip (LOC) devices. A critical aspect of designing IDC is the choice of the optimal passivation layer, as it affects the IDC´s sensitivity. In this work we present a quick and simple method (a) to optimize the sensitivity of dielectric sensors with homogeneous passivation layers and (b) to determine the frequencydependent permittivity of materials. Consequently, optimizing the permittivity of the passivation
layer and improving the measurement sensitivity of the dielectric sensor is significantly simplified, as it removes the need to perform a series of tedious experiments or computationally expensive simulations.
Original language | English |
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Pages (from-to) | 418-424 |
Number of pages | 7 |
Journal | Sensors and Actuators B-Chemical |
Volume | 162 |
Publication status | Published - 2012 |
Research Field
- Outside the AIT Research Fields
Keywords
- Interdigiated dielectric capacitors
- IDC
- Sensitivity
- Passivation layer
- Permittivity
- Optimization
- Capacitance