Original language | English |
---|---|
Pages (from-to) | 1467-1470 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 87 |
Publication status | Published - 2010 |
Research Field
- Former Research Field - Health and Bioresources
Alexandra Zima, A. Köck, T. Maier
Research output: Contribution to journal › Article › peer-review
Original language | English |
---|---|
Pages (from-to) | 1467-1470 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 87 |
Publication status | Published - 2010 |