Ion multi-beam direct sputtering of Si imprint stamps and simulation of resulting structures

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	55008
Number of pages	1
Journal	Journal of Micromechanics and Microengineering
Volume	22
DOIs	https://doi.org/10.1088/0960-1317/22/5/055008
Publication status	Published - 2012

Research Field

@article{bda8a5d6acac40f0b9128782f96a2435,

title = "Ion multi-beam direct sputtering of Si imprint stamps and simulation of resulting structures",

author = "S Eder-Kapl and A. Steiger-Thirsfeld and M. Wellenzohn and A. K{\"o}ck and R. Hainberger and H. L{\"o}schner and E Platzgummer",

year = "2012",

doi = "10.1088/0960-1317/22/5/055008",

language = "English",

volume = "22",

pages = "55008",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

}

TY - JOUR

T1 - Ion multi-beam direct sputtering of Si imprint stamps and simulation of resulting structures

AU - Eder-Kapl, S

AU - Steiger-Thirsfeld, A.

AU - Wellenzohn, M.

AU - Köck, A.

AU - Hainberger, R.

AU - Löschner, H.

AU - Platzgummer, E

PY - 2012

Y1 - 2012

U2 - 10.1088/0960-1317/22/5/055008

DO - 10.1088/0960-1317/22/5/055008

M3 - Article

SN - 0960-1317

VL - 22

SP - 55008

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -