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Ion multi-beam nanopatterning of Ni-Cu inserts for injection molding

  • A. Köck
  • , Roman Bruck
  • , Markus Wellenzohn
  • , Rainer Hainberger
  • , E Platzgummer
  • , W Löscher
  • , P Jöchl
  • , S Eder-Kapl
  • , P Czepl
  • , K Kaiblinger
  • , F Pipelka
  • , F Letzkus
  • , M Irmscher
  • , B Heitkamp

Research output: Contribution to journal › Article › peer-review

Original languageEnglish
Number of pages1
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume28
Issue number6
Publication statusPublished - 2010

Research Field

  • Former Research Field - Health and Bioresources

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