Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition

C Ebm, E Platzgummer, H. Löschner, S Eder-Kapl, P Jöchl, M Kümmel, R Reitinger, G Hobler, A. Köck, Rainer Hainberger, Markus Wellenzohn, F Letzkus, M Irmscher

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)2668-2673
Number of pages6
JournalJournal of Vacuum Science and Technology B
Issue number6
Publication statusPublished - 2009

Research Field

  • Former Research Field - Health and Bioresources

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