Localized ion beam induced deposition of Al-containing layers.

Friedrich Rüdenauer, W. Steiger, D. Schrottmayer

    Research output: Contribution to journal › Article

    Original languageEnglish
    Pages (from-to)1542-1547
    Number of pages6
    JournalJ. Vac. Sci. Technol., B(Sep/Oct 1988)
    Publication statusPublished - 1988

    Research Field

    • Not defined

    Keywords

    • FZS-000IPP

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