| Original language | English |
|---|---|
| Awarding Institution |
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| Supervisors/Advisors |
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| Award date | 14 Jan 2022 |
| DOIs | |
| Publication status | Published - 2022 |
Research Field
- Former Research Field - Data Science
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Machine Learning Methods for Analysis and Prognosis of Outages in Reactive Ion Etching Processes in the Semiconductor Industry
- Clemens Heistracher
Research output: Thesis › Master's Thesis