Methods of simulating thin film deposition using spray pyrolysis techniques

Lado Filipovic; S Selberherr; Giorgio Cataldo Mutinati; Elise Brunet; Stephan Steinhauer; Anton Köck; J. Teva; J. Kraft; J. Siegert; F Schrank

Methods of simulating thin film deposition using spray pyrolysis techniques

Lado Filipovic, S Selberherr, Giorgio Cataldo Mutinati, Elise Brunet, Stephan Steinhauer, Anton Köck, J. Teva, J. Kraft, J. Siegert, F Schrank

Molecular Diagnostics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	57-66
Number of pages	10
Journal	Microelectronic Engineering
Issue number	117
Publication status	Published - 2014

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Cite this

@article{f9de4f57bbdc4933b557fb65f5bcb5d2,

title = "Methods of simulating thin film deposition using spray pyrolysis techniques",

author = "Lado Filipovic and S Selberherr and Mutinati, {Giorgio Cataldo} and Elise Brunet and Stephan Steinhauer and Anton K{\"o}ck and J. Teva and J. Kraft and J. Siegert and F Schrank",

year = "2014",

language = "English",

pages = "57--66",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "117",

}

TY - JOUR

T1 - Methods of simulating thin film deposition using spray pyrolysis techniques

AU - Filipovic, Lado

AU - Selberherr, S

AU - Mutinati, Giorgio Cataldo

AU - Brunet, Elise

AU - Steinhauer, Stephan

AU - Köck, Anton

AU - Teva, J.

AU - Kraft, J.

AU - Siegert, J.

AU - Schrank, F

PY - 2014

Y1 - 2014

M3 - Article

SN - 0167-9317

SP - 57

EP - 66

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 117

ER -