Mirco-technology of densely spaced non-conventional patterns for space applications

Friedrich Rüdenauer, Günther Stangl, P. Hudek, I. Kostik, I. Rangelow, Karl Riedling, Wolfgang Fallmann

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	187-190
Number of pages	4
Journal	Microelectronic Engineering
Publication status	Published - 1998

Research Field

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title = "Mirco-technology of densely spaced non-conventional patterns for space applications",

author = "Friedrich R{\"u}denauer and G{\"u}nther Stangl and P. Hudek and I. Kostik and I. Rangelow and Karl Riedling and Wolfgang Fallmann",

year = "1998",

language = "English",

pages = "187--190",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}

TY - JOUR

T1 - Mirco-technology of densely spaced non-conventional patterns for space applications

AU - Rüdenauer, Friedrich

AU - Stangl, Günther

AU - Hudek, P.

AU - Kostik, I.

AU - Rangelow, I.

AU - Riedling, Karl

AU - Fallmann, Wolfgang

PY - 1998

Y1 - 1998

M3 - Article

SN - 0167-9317

SP - 187

EP - 190

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -