Original language | English |
---|---|
Pages (from-to) | 269-277 |
Number of pages | 9 |
Journal | IEEE Transactions on Semiconductor Manufacturing |
Volume | 27 |
Issue number | 2 |
Publication status | Published - 2014 |
Research Field
- Outside the AIT Research Fields
Lado Filipovic, S Selberherr, Giorgio Cataldo Mutinati, Elise Brunet, Stephan Steinhauer, Anton Köck, J. Teva, J. Kraft, J. Siegert, F Schrank, C Gspan, W. Grogger
Research output: Contribution to journal › Article › peer-review
Original language | English |
---|---|
Pages (from-to) | 269-277 |
Number of pages | 9 |
Journal | IEEE Transactions on Semiconductor Manufacturing |
Volume | 27 |
Issue number | 2 |
Publication status | Published - 2014 |