Modeling the Growth of Tin Dioxide Using Spray Pyrolysis Deposition for Gas Sensor Applications

Lado Filipovic, S Selberherr, Giorgio Cataldo Mutinati, Elise Brunet, Stephan Steinhauer, Anton Köck, J. Teva, J. Kraft, J. Siegert, F Schrank, C Gspan, W. Grogger

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)269-277
Number of pages9
JournalIEEE Transactions on Semiconductor Manufacturing
Volume27
Issue number2
Publication statusPublished - 2014

Research Field

  • Outside the AIT Research Fields

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