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Modeling the Growth of Tin Dioxide Using Spray Pyrolysis Deposition for Gas Sensor Applications

  • Lado Filipovic
  • , S Selberherr
  • , Giorgio Cataldo Mutinati
  • , Elise Brunet
  • , Stephan Steinhauer
  • , Anton Köck
  • , J. Teva
  • , J. Kraft
  • , J. Siegert
  • , F Schrank
  • , C Gspan
  • , W. Grogger

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)269-277
Number of pages9
JournalIEEE Transactions on Semiconductor Manufacturing
Volume27
Issue number2
Publication statusPublished - 2014

Research Field

  • Outside the AIT Research Fields

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