Monolithically Integrated, CMOS-Compatible SiN Photonics for Sensing Applications

Martin Sagmeister; Günther Koppitsch; Paul Muellner; Stefan Nevlacsil; Alejandro Maese Novo; Rainer Hainberger; Dana Seyringer; Jochen Kraft

doi:10.3390/proceedings2131023

Monolithically Integrated, CMOS-Compatible SiN Photonics for Sensing Applications

Martin Sagmeister
, Günther Koppitsch
, Paul Muellner
, Stefan Nevlacsil
, Alejandro Maese Novo
, Rainer Hainberger
, Dana Seyringer
, Jochen Kraft

Molecular Diagnostics

ams OSRAM

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Proceedings
DOIs	https://doi.org/10.3390/proceedings2131023
Publication status	Published - Nov 2018

Research Field

Molecular Diagnostics

Access to Document

10.3390/proceedings2131023

Cite this

@article{58c97c2bcc694b57b3111f8132f95622,

title = "Monolithically Integrated, CMOS-Compatible SiN Photonics for Sensing Applications",

author = "Martin Sagmeister and G{\"u}nther Koppitsch and Paul Muellner and Stefan Nevlacsil and \{Maese Novo\}, Alejandro and Rainer Hainberger and Dana Seyringer and Jochen Kraft",

year = "2018",

month = nov,

doi = "10.3390/proceedings2131023",

language = "English",

}

TY - JOUR

T1 - Monolithically Integrated, CMOS-Compatible SiN Photonics for Sensing Applications

AU - Sagmeister, Martin

AU - Koppitsch, Günther

AU - Muellner, Paul

AU - Nevlacsil, Stefan

AU - Maese Novo, Alejandro

AU - Hainberger, Rainer

AU - Seyringer, Dana

AU - Kraft, Jochen

PY - 2018/11

Y1 - 2018/11

U2 - 10.3390/proceedings2131023

DO - 10.3390/proceedings2131023

M3 - Article

SN - 2504-3900

JO - Proceedings

JF - Proceedings

ER -