Original language | English |
---|---|
Pages (from-to) | 1856-1859 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 88 |
Publication status | Published - 2011 |
Research Field
- Outside the AIT Research Fields
Claudia Preininger, Ursula Sauer, M. Chouiki, R. Schöftner
Research output: Contribution to journal › Article › peer-review
Original language | English |
---|---|
Pages (from-to) | 1856-1859 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 88 |
Publication status | Published - 2011 |