Optimal Design of Baking Plates for an Inductive Wafer Baking Oven

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

Original language	English
Title of host publication	Proceedings of the COMSOL 2023 Conference
Publication status	Published - Oct 2023
Event	COMSOL Conference - München, Germany Duration: 25 Oct 2023 → 27 Oct 2023

Research Field

@inproceedings{1f52345c9dd843d7b6d6ad5bd3dd4901,

title = "Optimal Design of Baking Plates for an Inductive Wafer Baking Oven",

keywords = "Process control, Induction heating, Optimal design, Parametric optimization",

author = "Johannes Steinbach and Lukas Jadachowski and Andreas Kugi and Andreas Steinb{\"o}ck",

year = "2023",

month = oct,

language = "English",

booktitle = "Proceedings of the COMSOL 2023 Conference",

note = "COMSOL Conference ; Conference date: 25-10-2023 Through 27-10-2023",

}

TY - GEN

T1 - Optimal Design of Baking Plates for an Inductive Wafer Baking Oven

AU - Steinbach, Johannes

AU - Jadachowski, Lukas

AU - Kugi, Andreas

AU - Steinböck, Andreas

PY - 2023/10

Y1 - 2023/10

KW - Process control

KW - Induction heating

KW - Optimal design

KW - Parametric optimization

M3 - Conference Proceedings with Oral Presentation

BT - Proceedings of the COMSOL 2023 Conference

T2 - COMSOL Conference

Y2 - 25 October 2023 through 27 October 2023

ER -