PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region

Rainer Hainberger; P. Müllner; Stefan Nevlacsil; Florian Vogelbacher; Alejandro Maese-Novo; Martin Sagmeister; Günther Koppitsch; J. Kraft; Xue Zhou; Jinhua Huang; Mingzhu Li; Ke-Jian Jiang; Yanlin Song

PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region

Rainer Hainberger (Speaker, Invited)
, P. Müllner (Author, Invited)
, Stefan Nevlacsil (Author, Invited)
, Florian Vogelbacher (Author, Invited)
, Alejandro Maese-Novo (Author, Invited)
, Martin Sagmeister (Author, Invited)
, Günther Koppitsch (Author, Invited)
, J. Kraft (Author, Invited)
, Xue Zhou (Author, Invited)
, Jinhua Huang (Author, Invited)
, Mingzhu Li (Author, Invited)
, Ke-Jian Jiang (Author, Invited)
, Yanlin Song (Author, Invited)

Molecular Diagnostics

Institute of Chemistry, Chinese Academy of Sciences

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

Original language	English
Title of host publication	SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications
Publication status	Published - 2019
Event	SPIE Optics - Duration: 1 Apr 2019 → 4 Apr 2019

Conference

Conference	SPIE Optics
Period	1/04/19 → 4/04/19

Research Field

Molecular Diagnostics

Cite this

Hainberger, R., Müllner, P., Nevlacsil, S., Vogelbacher, F., Maese-Novo, A., Sagmeister, M., Koppitsch, G., Kraft, J., Zhou, X., Huang, J., Li, M., Jiang, K.-J., & Song, Y. (2019). PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region. In SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications

@inproceedings{133093cccc13478ba1100c4d4d11e4a0,

title = "PECVD silicon nitride optical waveguide devices for sensing applications in the visible and \#lt1μm near infrared wavelength region",

author = "Rainer Hainberger and P. M{\"u}llner and Stefan Nevlacsil and Florian Vogelbacher and Alejandro Maese-Novo and Martin Sagmeister and G{\"u}nther Koppitsch and J. Kraft and Xue Zhou and Jinhua Huang and Mingzhu Li and Ke-Jian Jiang and Yanlin Song",

year = "2019",

language = "English",

booktitle = "SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications",

note = "SPIE Optics ; Conference date: 01-04-2019 Through 04-04-2019",

}

Hainberger, R , Müllner, P, Nevlacsil, S, Vogelbacher, F, Maese-Novo, A, Sagmeister, M, Koppitsch, G, Kraft, J, Zhou, X, Huang, J, Li, M, Jiang, K-J & Song, Y 2019, PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region. in SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications. SPIE Optics, 1/04/19.

PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region. / Hainberger, Rainer (Speaker, Invited); Müllner, P. (Author, Invited); Nevlacsil, Stefan (Author, Invited) et al.
SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications. 2019.

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

TY - GEN

T1 - PECVD silicon nitride optical waveguide devices for sensing applications in the visible and #lt1μm near infrared wavelength region

A2 - Hainberger, Rainer

A2 - Müllner, P.

A2 - Nevlacsil, Stefan

A2 - Vogelbacher, Florian

A2 - Maese-Novo, Alejandro

A2 - Sagmeister, Martin

A2 - Koppitsch, Günther

A2 - Kraft, J.

A2 - Zhou, Xue

A2 - Huang, Jinhua

A2 - Li, Mingzhu

A2 - Jiang, Ke-Jian

A2 - Song, Yanlin

PY - 2019

Y1 - 2019

M3 - Conference Proceedings with Oral Presentation

BT - SPIE Optics + Optoelectronics - Integrated Optics: Design, Devices, Systems and Applications

T2 - SPIE Optics

Y2 - 1 April 2019 through 4 April 2019

ER -