PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

Rainer Hainberger; Paul Müllner; Stefan Nevlacsil; M. Eggeling; Florian Vogelbacher; Martin Sagmeister; Gerald Meinhardt; K Rohracher; S. Jessenig; Desiree Rist; J. Kraft

doi:10.1117/12.2606125

PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

Rainer Hainberger (Speaker, Invited), Paul Müllner (Author, Invited), Stefan Nevlacsil (Author, Invited), M. Eggeling (Author, Invited), Florian Vogelbacher (Author, Invited), Martin Sagmeister (Author, Invited), Gerald Meinhardt (Author, Invited), K Rohracher (Author, Invited), S. Jessenig (Author, Invited), Desiree Rist (Author, Invited), J. Kraft (Author, Invited)

Molecular Diagnostics

ams AG

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

Original language	English
Title of host publication	Photonics West 2022 (on demand)
Pages	1
Number of pages	1
DOIs	https://doi.org/10.1117/12.2606125
Publication status	Published - 2022
Event	Photonics West 2022 - Duration: 21 Feb 2022 → 27 Feb 2022

Conference

Conference	Photonics West 2022
Period	21/02/22 → 27/02/22

Research Field

Molecular Diagnostics

Access to Document

10.1117/12.2606125Licence: Unspecified

Cite this

@inproceedings{44d2118e94b3401c80045ff33ba3bb38,

title = "PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications",

author = "Rainer Hainberger and Paul M{\"u}llner and Stefan Nevlacsil and M. Eggeling and Florian Vogelbacher and Martin Sagmeister and Gerald Meinhardt and K Rohracher and S. Jessenig and Desiree Rist and J. Kraft",

year = "2022",

doi = "10.1117/12.2606125",

language = "English",

pages = "1",

booktitle = "Photonics West 2022 (on demand)",

note = "Photonics West 2022 ; Conference date: 21-02-2022 Through 27-02-2022",

}

PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications. / Hainberger, Rainer (Speaker, Invited); Müllner, Paul (Author, Invited); Nevlacsil, Stefan (Author, Invited) et al.
Photonics West 2022 (on demand). 2022. p. 1.

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

TY - GEN

T1 - PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

A2 - Hainberger, Rainer

A2 - Müllner, Paul

A2 - Nevlacsil, Stefan

A2 - Eggeling, M.

A2 - Vogelbacher, Florian

A2 - Sagmeister, Martin

A2 - Meinhardt, Gerald

A2 - Rohracher, K

A2 - Jessenig, S.

A2 - Rist, Desiree

A2 - Kraft, J.

PY - 2022

Y1 - 2022

U2 - 10.1117/12.2606125

DO - 10.1117/12.2606125

M3 - Conference Proceedings with Oral Presentation

SP - 1

BT - Photonics West 2022 (on demand)

T2 - Photonics West 2022

Y2 - 21 February 2022 through 27 February 2022

ER -