PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

Rainer Hainberger; Paul Müllner; Stefan Nevlacsil; M. Eggeling; Florian Vogelbacher; Martin Sagmeister; Gerald Meinhardt; K Rohracher; S. Jessenig; Desiree Rist; J. Kraft

doi:10.1117/12.2606125

PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

Rainer Hainberger (Speaker, Invited)
, Paul Müllner (Author, Invited)
, Stefan Nevlacsil (Author, Invited)
, M. Eggeling (Author, Invited)
, Florian Vogelbacher (Author, Invited)
, Martin Sagmeister (Author, Invited)
, Gerald Meinhardt (Author, Invited)
, K Rohracher (Author, Invited)
, S. Jessenig (Author, Invited)
, Desiree Rist (Author, Invited)
, J. Kraft (Author, Invited)

Molecular Diagnostics

ams AG

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

Original language	English
Title of host publication	Photonics West 2022 (on demand)
Pages	1
Number of pages	1
DOIs	https://doi.org/10.1117/12.2606125
Publication status	Published - 2022
Event	Photonics West 2022 - Duration: 21 Feb 2022 → 27 Feb 2022

Conference

Conference	Photonics West 2022
Period	21/02/22 → 27/02/22

Research Field

Molecular Diagnostics

Access to Document

10.1117/12.2606125Licence: Unspecified

Cite this

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title = "PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications",

author = "Rainer Hainberger and Paul M{\"u}llner and Stefan Nevlacsil and M. Eggeling and Florian Vogelbacher and Martin Sagmeister and Gerald Meinhardt and K Rohracher and S. Jessenig and Desiree Rist and J. Kraft",

year = "2022",

doi = "10.1117/12.2606125",

language = "English",

pages = "1",

booktitle = "Photonics West 2022 (on demand)",

note = "Photonics West 2022 ; Conference date: 21-02-2022 Through 27-02-2022",

}

PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications. / Hainberger, Rainer (Speaker, Invited); Müllner, Paul (Author, Invited); Nevlacsil, Stefan (Author, Invited) et al.
Photonics West 2022 (on demand). 2022. p. 1.

Research output: Chapter in Book or Conference Proceedings › Conference Proceedings with Oral Presentation › peer-review

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A2 - Hainberger, Rainer

A2 - Müllner, Paul

A2 - Nevlacsil, Stefan

A2 - Eggeling, M.

A2 - Vogelbacher, Florian

A2 - Sagmeister, Martin

A2 - Meinhardt, Gerald

A2 - Rohracher, K

A2 - Jessenig, S.

A2 - Rist, Desiree

A2 - Kraft, J.

PY - 2022

Y1 - 2022

U2 - 10.1117/12.2606125

DO - 10.1117/12.2606125

M3 - Conference Proceedings with Oral Presentation

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BT - Photonics West 2022 (on demand)

T2 - Photonics West 2022

Y2 - 21 February 2022 through 27 February 2022

ER -